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Zeorora® is an environmentally friendly fluoro compound developed to meet a variety of applications. It has a short atmospheric lifetime “Zero” Ozone Depletion Potential (ODP) and minimal Global Warming Potential (GWP). High-performance Zeorora is non-flammable, chemically stable and features good solubility in alcohols and hydrocarbons, with its boiling point of 82.5°F (27°C). ZEORORAZFL-58 (C5F8)Dry Etching Gas ZFL-58 is an environmentally friendly new etching gas.FeaturesHigh etch rateHigh selectivityOzone delpetion potential is 0Short atmospheric lifetime and minimal global-warming potentialDry etching agentComparison of gas chemistry (C4F8 vs. C5F8)Comparison of contact profile using three kinds of gases after etchingEtching ExampleProperties ZEORORA ZFL-58 (C5F8) Boiling point (°C) 27 Relative density (kg/m3) 1580 Viscosity (Pa•s) 0.0038 Surface tension (mN/m) 17.8 Specific heat (J/(kg•K)) 1160 Latent heat of vaporization (kJ/kg) 118 Critical temperature (°C) 159.9 Critical pressure (MPa) 2.47 Flash point (°C) No flash point Explosive properties Non-explosive Auto-ignition point – Solubility for water (g/100g water) 0.00756 Solubility of water (g/100g solvent) 0.0072 Atmospheric lifetime (year) 0.98 ODP (CFC-11=1) 0 GWP (CO2=1 100 years) 90