Zeorora® is an environmentally friendly fluoro compound developed to meet a variety of applications. It has a short atmospheric lifetime “Zero” Ozone Depletion Potential (ODP) and minimal Global Warming Potential (GWP). High-performance Zeorora is non-flammable, chemically stable and features good solubility in alcohols and hydrocarbons, with its boiling point of 82.5°F (27°C). 

Features
High etch rate
High selectivity
Ozone delpetion potential is 0
Short atmospheric lifetime and minimal global-warming potential
Dry etching agent


Comparison of gas chemistry (C4F8 vs. C5F8)




Comparison of contact profile using three kinds of gases after etching




Etching Example




Properties

	ZEORORA ZFL-58 (C5F8)
Boiling point (°C)	27
Relative density (kg/m3)	1580
Viscosity (Pa•s)	0.0038
Surface tension (mN/m)	17.8
Specific heat (J/(kg•K))	1160
Latent heat of vaporization (kJ/kg)	118
Critical temperature (°C)	159.9
Critical pressure (MPa)	2.47
Flash point (°C)	No flash point
Explosive properties	Non-explosive
Auto-ignition point	–
Solubility for water (g/100g water)	0.00756
Solubility of water (g/100g solvent)	0.0072
Atmospheric lifetime (year)	0.98
ODP (CFC-11=1)	0
GWP (CO2=1 100 years)	90