ELECTRONIC MATERIALS

Electron Beam Resist

A wide selection for a variety of needs, including photomasks, EB direct drawing, thin film magnetic heads, and compound semiconductors, as well as research and development.

Product	Properties	Applications	View Report
ZEP520A ZEP520A-7	Positive EB resists, chain scission type, for wet and dry etch.	R&D, GMR head, etc.	ZEP520A.pdf
ZEP7000	Positive EB resists, chain scission type, for wet and dry etch.	Photo mask, X-ray mask, R&D, etc.	ZEP7000.pdf

Thinner for Electron Beam Resist

Solvent to adjust the viscosity of ZEON’s electron beam resist.

Product	Properties	Applications	View Report
ZEP-A	Thinner for ZEP520A and ZEP7000A resists	Thinner, Cleaner	ZEP520A.pdf
ZEP-D	Thinner for ZEP7000 resist	Thinner, Cleaner	ZEP7000.pdf

Developer and Rinse for Electron Beam Resist

Developers and rinse for ZEON’s electron beam resist.

Product	Properties	Applications	View Report
ZED-N50	Developer for ZEP520 series resists	Developer for ZEP520A	ZEP520A.pdf
ZED-500	Developer for ZEP7000 series resists	Developer for ZEP7000	ZEP7000.pdf
ZED-750	Developer for ZEP7000 series resists	Developer for ZEP7000	ZEP7000.pdf
ZMD-D	Rinse for ZEP520 and ZEP7000 series resists		ZEP7000.pdf

Separator and Insulator for EL Display

Organic EL display material.

Product	Properties	Applications	View Report
ZPN2464-27	Under cut pattern profile, Good thermal stability, Low degas level	Cathode Electrode for EL device	ZPN2464.pdf
ZWD6216-6	Alkaline development, Good organic solvent resistance, Low degas level	Insulator for EL device	ZWD6216.pdf